Inventor
OTTENS JOOST JEROEN
NL125 patents
⚠️ This page may combine multiple inventors who share the name “OTTENS JOOST JEROEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
37 patentsUS7213963B2May 8, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV196 citations99
US7864292B2Jan 4, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV57 citations98
US7385670B2Jun 10, 2008
Lithographic apparatus, cleaning system and cleaning method for in situ removing contamination from a component in a lithographic apparatus
ASML NETHERLANDS BV64 citations97
US7649611B2Jan 19, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV45 citations96
US7602470B2Oct 13, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV20 citations95
US7304715B2Dec 4, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV52 citations94
US8027019B2Sep 27, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV15 citations92
US7978306B2Jul 12, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV28 citations92
US7804577B2Sep 28, 2010
Lithographic apparatus
ASML NETHERLANDS BV26 citations92
US7804575B2Sep 28, 2010
Lithographic apparatus and device manufacturing method having liquid evaporation control
ASML NETHERLANDS BV23 citations92
US7656501B2Feb 2, 2010
Lithographic apparatus
ASML NETHERLANDS BV22 citations92
US7411657B2Aug 12, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV30 citations92
US7227619B2Jun 5, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV28 citations92
US7110085B2Sep 19, 2006
Lithographic apparatus, substrate holder and method of manufacturing
ASML NETHERLANDS BV36 citations92
US7532310B2May 12, 2009
Apparatus, method for supporting and/or thermally conditioning a substrate, a support table, and a chuck
ASML NETHERLANDS BV28 citations91
US7327439B2Feb 5, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV19 citations91
US7187433B2Mar 6, 2007
Electrostatic clamp assembly for a lithographic apparatus
ASML NETHERLANDS BV18 citations91
US7088431B2Aug 8, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV23 citations91
US7250237B2Jul 31, 2007
Optimized correction of wafer thermal deformations in a lithographic process
ASML NETHERLANDS BV19 citations90
US7119885B2Oct 10, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV19 citations90
US7092231B2Aug 15, 2006
Chuck, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV41 citations89
US6897945B1May 24, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV19 citations89
US11669021B2Jun 6, 2023
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations84
US10761433B2Sep 1, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US9851644B2Dec 26, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US9436096B2Sep 6, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations84
US9140996B2Sep 22, 2015
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV7 citations84
US7420194B2Sep 2, 2008
Lithographic apparatus and substrate edge seal
ASML NETHERLANDS BV10 citations84
US7106416B2Sep 12, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations84
US7196768B2Mar 27, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations83
US7791709B2Sep 7, 2010
Substrate support and lithographic process
ASML NETHERLANDS BV11 citations82
US7751027B2Jul 6, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV18 citations82
US7453063B2Nov 18, 2008
Calibration substrate and method for calibrating a lithographic apparatus
ASML NETHERLANDS BV16 citations82
US7239368B2Jul 3, 2007
Using unflatness information of the substrate table or mask table for decreasing overlay
ASML NETHERLANDS BV10 citations81
US7119884B2Oct 10, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV17 citations79
US7307696B2Dec 11, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations74
US7019816B2Mar 28, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV8 citations74
LOF JOERI
2 patentsJACOBS JOHANNES HENRICUS WILHELMUS
2 patentsLEENDERS MARTINUS HENDRIKUS ANTONIUS
2 patentsKEMPER NICOLAAS RUDOLF
2 patentsCADEE THEODORUS PETRUS MARIA
2 patentsZAAL KOEN JACOBUS JOHANNES MARIA
1 patentVAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS
1 patentVAN MIERLO HUBERT ADRIAAN
1 patentShowing the top 50 of 125 patents by PatentIndex Score.