Inventor
ZAAL KOEN JACOBUS JOHANNES MAR
NL19 patents
Patents
19 patentsUS7411657B2Aug 12, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV30 citations92
US7227619B2Jun 5, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV28 citations92
US7145269B2Dec 5, 2006
Lithographic apparatus, Lorentz actuator, and device manufacturing method
ASML NETHERLANDS BV30 citations92
US7110085B2Sep 19, 2006
Lithographic apparatus, substrate holder and method of manufacturing
ASML NETHERLANDS BV36 citations92
US7327439B2Feb 5, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV19 citations91
US7187433B2Mar 6, 2007
Electrostatic clamp assembly for a lithographic apparatus
ASML NETHERLANDS BV18 citations91
US7119885B2Oct 10, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV19 citations90
US6897945B1May 24, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV19 citations89
US7327437B2Feb 5, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations84
US7239368B2Jul 3, 2007
Using unflatness information of the substrate table or mask table for decreasing overlay
ASML NETHERLANDS BV10 citations81
US7019816B2Mar 28, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV8 citations74
US7161662B2Jan 9, 2007
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV8 citations73
US7113262B2Sep 26, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV8 citations69
US7027132B2Apr 11, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations63
US7019820B2Mar 28, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations63
US7133120B2Nov 7, 2006
Lithographic apparatus, article support member, and method
ASML NETHERLANDS BV2 citations62
US7110091B2Sep 19, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV4 citations61
US7230254B2Jun 12, 2007
Movable carriage for a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US7327438B2Feb 5, 2008
Lithographic apparatus and method of a manufacturing device
ASML NETHERLANDS BV0 citations49