Inventor
LE KLUSE MARCO
NL6 patents
⚠️ This page may combine multiple inventors who share the name “LE KLUSE MARCO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
5 patentsUS7187433B2Mar 6, 2007
Electrostatic clamp assembly for a lithographic apparatus
ASML NETHERLANDS BV18 citations91
US6897945B1May 24, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV19 citations89
US7041989B1May 9, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations72
US7245357B2Jul 17, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations68
US7528935B2May 5, 2009
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV0 citations51