Inventor

CORNELISSEN SEBASTIAAN MARIA JOHANNES

NL6 patents

⚠️ This page may combine multiple inventors who share the name “CORNELISSEN SEBASTIAAN MARIA JOHANNES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

4 patents

US7928407B2Apr 19, 2011

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV4 citations73

US9494875B2Nov 15, 2016

Chuck, a chuck control system, a lithography apparatus and a method of using a chuck

ASML NETHERLANDS BV4 citations70

US7755742B2Jul 13, 2010

Lithographic apparatus with mounted sensor

ASML NETHERLANDS BV2 citations57

US7679720B2Mar 16, 2010

Apparatus configured to position a workpiece

ASML NETHERLANDS BV0 citations48

JANSEN HANS

2 patents

US8138486B2Mar 20, 2012

Lithographic apparatus and device manufacturing method

JANSEN HANS2 citations62

US8481978B2Jul 9, 2013

Lithographic apparatus and device manufacturing method

JANSEN HANS0 citations51