Inventor
SMITH WALTER LEE
US9 patents
⚠️ This page may combine multiple inventors who share the name “SMITH WALTER LEE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
THERMA WAVE INC
6 patentsUS6898596B2May 24, 2005
Evolution of library data sets
THERMA WAVE INC74 citations96
US6888632B2May 3, 2005
Modulated scatterometry
THERMA WAVE INC41 citations94
US6791310B2Sep 14, 2004
Systems and methods for improved metrology using combined optical and electrical measurements
THERMA WAVE INC28 citations91
US6950190B2Sep 27, 2005
Scatterometry for junction metrology
THERMA WAVE INC13 citations82
US6982567B2Jan 3, 2006
Combination optical and electrical metrology apparatus
THERMA WAVE INC5 citations72
US7239390B2Jul 3, 2007
Modulated scatterometry
THERMA WAVE INC4 citations61