Inventor

JOHNS TIMOTHY

US4 patents

⚠️ This page may combine multiple inventors who share the name “JOHNS TIMOTHY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CABOT MICROELECTRONICS CORP

1 patent

US7846842B2Dec 7, 2010

Polishing composition and method for high silicon nitride to silicon oxide removal rate ratios

CABOT MICROELECTRONICS CORP10 citations81

REISS BRIAN

1 patent

US8697576B2Apr 15, 2014

Composition and method for polishing polysilicon

REISS BRIAN5 citations70

WARD WILLIAM

1 patent

US9548211B2Jan 17, 2017

Method to selectively polish silicon carbide films

WARD WILLIAM2 citations69

DYSARD JEFFREY

1 patent

US8759216B2Jun 24, 2014

Compositions and methods for polishing silicon nitride materials

DYSARD JEFFREY6 citations65