Inventor
ADAMEC PAVEL
DE43 patents
⚠️ This page may combine multiple inventors who share the name “ADAMEC PAVEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEGRATED CIRCUIT TESTING
24 patentsUS7274018B2Sep 25, 2007
Charged particle beam apparatus and method for operating the same
INTEGRATED CIRCUIT TESTING162 citations98
US7045781B2May 16, 2006
Charged particle beam apparatus and method for operating the same
INTEGRATED CIRCUIT TESTING214 citations98
US6943349B2Sep 13, 2005
Multi beam charged particle device
INTEGRATED CIRCUIT TESTING126 citations97
US7253417B2Aug 7, 2007
Multi-axis compound lens, beam system making use of the compound lens, and method using the compound lens
INTEGRATED CIRCUIT TESTING39 citations93
US6943507B2Sep 13, 2005
Device and method for controlling focussed electron beams
INTEGRATED CIRCUIT TESTING19 citations93
US6825476B2Nov 30, 2004
Column for a charged particle beam device
INTEGRATED CIRCUIT TESTING14 citations84
US6747279B2Jun 8, 2004
Objective lens for a charged particle beam device
INTEGRATED CIRCUIT TESTING13 citations84
US7595490B2Sep 29, 2009
Charged particle beam emitting device and method for operating a charged particle beam emitting device
INTEGRATED CIRCUIT TESTING10 citations83
US7075075B2Jul 11, 2006
Charged particle deflecting system
INTEGRATED CIRCUIT TESTING16 citations83
US7638777B2Dec 29, 2009
Imaging system with multi source array
INTEGRATED CIRCUIT TESTING8 citations81
US8957390B2Feb 17, 2015
Electron gun arrangement
INTEGRATED CIRCUIT TESTING4 citations73
US8044368B2Oct 25, 2011
Lens coil cooling of a magnetic lens
INTEGRATED CIRCUIT TESTING3 citations63
US7982179B2Jul 19, 2011
Beam current calibration system
INTEGRATED CIRCUIT TESTING4 citations63
US7932495B2Apr 26, 2011
Fast wafer inspection system
INTEGRATED CIRCUIT TESTING6 citations63
US7928403B2Apr 19, 2011
Multiple lens assembly and charged particle beam device comprising the same
INTEGRATED CIRCUIT TESTING5 citations63
US7919749B2Apr 5, 2011
Energy filter for cold field emission electron beam apparatus
INTEGRATED CIRCUIT TESTING2 citations63
US7659514B2Feb 9, 2010
Asymmetric annular detector
INTEGRATED CIRCUIT TESTING3 citations63
US7268361B2Sep 11, 2007
Electron emission device
INTEGRATED CIRCUIT TESTING4 citations63
US7928405B2Apr 19, 2011
Magnetic lens assembly
INTEGRATED CIRCUIT TESTING4 citations59
US7282711B2Oct 16, 2007
Multiple electron beam device
INTEGRATED CIRCUIT TESTING6 citations58
US8008629B2Aug 30, 2011
Charged particle beam device and method for inspecting specimen
INTEGRATED CIRCUIT TESTING3 citations54
US8987692B2Mar 24, 2015
High brightness electron gun, system using the same, and method of operating thereof
INTEGRATED CIRCUIT TESTING1 citations52
US7842930B2Nov 30, 2010
Charged particle detector assembly, charged particle beam apparatus and method for generating an image
INTEGRATED CIRCUIT TESTING1 citations52
US7872239B2Jan 18, 2011
Electrostatic lens assembly
INTEGRATED CIRCUIT TESTING0 citations48
ADAMEC PAVEL
6 patentsUS8674300B2Mar 18, 2014
Feedback loop for emitter flashing
ADAMEC PAVEL6 citations72
US8618500B2Dec 31, 2013
Multi channel detector, optics therefor and method of operating thereof
ADAMEC PAVEL5 citations72
US8530837B2Sep 10, 2013
Arrangement and method for the contrast improvement in a charged particle beam device for inspecting a specimen
ADAMEC PAVEL5 citations72
US8101911B2Jan 24, 2012
Method and device for improved alignment of a high brightness charged particle gun
ADAMEC PAVEL2 citations62
US8164067B2Apr 24, 2012
Arrangement and method for the contrast improvement in a charged particle beam device for inspecting a specimen
ADAMEC PAVEL3 citations59
US8878148B2Nov 4, 2014
Method and apparatus of pretreatment of an electron gun chamber
ADAMEC PAVEL0 citations25
APPLIED MATERIALS ISRAEL LTD
4 patentsUS7067807B2Jun 27, 2006
Charged particle beam column and method of its operation
APPLIED MATERIALS ISRAEL LTD28 citations92
US7034297B2Apr 25, 2006
Method and system for use in the monitoring of samples with a charged particle beam
APPLIED MATERIALS ISRAEL LTD22 citations89
US6825475B2Nov 30, 2004
Deflection method and system for use in a charged particle beam column
APPLIED MATERIALS ISRAEL LTD13 citations82
US7847267B2Dec 7, 2010
Scanning electron microscope having multiple detectors and a method for multiple detector based imaging
APPLIED MATERIALS ISRAEL LTD4 citations63
APPLIED MATERIALS INC
3 patentsICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH
3 patentsUS9847208B1Dec 19, 2017
Electron beam device, cold field emitter, and method for regeneration of a cold field emitter
ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH11 citations84
US9633815B1Apr 25, 2017
Emitter for an electron beam, electron beam device and method for producing and operating an electron emitter
ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH11 citations76
US9673017B1Jun 6, 2017
Housing device for magnetic shielding, housing arrangement for magnetic shielding, charged particle beam device, and method of manufacturing a housing device
ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH0 citations52
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH
2 patentsUS10504684B1Dec 10, 2019
High performance inspection scanning electron microscope device and method of operating the same
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH2 citations73
US11469072B2Oct 11, 2022
Charged particle beam apparatus, scanning electron microscope, and method of operating a charged particle beam apparatus
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH0 citations62