Inventor
DEGENHARDT RALF
DE12 patents
⚠️ This page may combine multiple inventors who share the name “DEGENHARDT RALF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEGRATED CIRCUIT TESTING
8 patentsUS7274018B2Sep 25, 2007
Charged particle beam apparatus and method for operating the same
INTEGRATED CIRCUIT TESTING162 citations98
US7045781B2May 16, 2006
Charged particle beam apparatus and method for operating the same
INTEGRATED CIRCUIT TESTING214 citations98
US6943349B2Sep 13, 2005
Multi beam charged particle device
INTEGRATED CIRCUIT TESTING126 citations97
US7507956B2Mar 24, 2009
Charged particle beam energy width reduction system for charged particle beam system
INTEGRATED CIRCUIT TESTING9 citations84
US7429740B2Sep 30, 2008
Electric-magnetic field-generating element and assembling method for same
INTEGRATED CIRCUIT TESTING8 citations71
US7679054B2Mar 16, 2010
Double stage charged particle beam energy width reduction system for charged particle beam system
INTEGRATED CIRCUIT TESTING3 citations63
US7468517B2Dec 23, 2008
Single stage charged particle beam energy width reduction system for charged particle beam system
INTEGRATED CIRCUIT TESTING4 citations62
US7361897B2Apr 22, 2008
Imaging apparatus for high probe currents
INTEGRATED CIRCUIT TESTING0 citations51