Inventor
FEUERBAUM HANS-PETER
DE37 patents
⚠️ This page may combine multiple inventors who share the name “FEUERBAUM HANS-PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SIEMENS AG
18 patentsUS4831266AMay 16, 1989
Detector objective for particle beam apparatus
SIEMENS AG68 citations96
US4812651AMar 14, 1989
Spectrometer objective for particle beam measuring instruments
SIEMENS AG46 citations93
US4713543ADec 15, 1987
Scanning particle microscope
SIEMENS AG47 citations92
US4460866AJul 17, 1984
Method for measuring resistances and capacitances of electronic components
SIEMENS AG30 citations92
US4296372AOct 20, 1981
Techniques for impressing a voltage with an electron beam
SIEMENS AG32 citations92
US4220853ASep 2, 1980
Method for the contactless measurement of the potential waveform in an electronic component and arrangement for implementing the method
SIEMENS AG33 citations92
US4808821AFeb 28, 1989
Spectrometer objective for electron beam mensuration techniques
SIEMENS AG20 citations82
US4413181ANov 1, 1983
Arrangement for stroboscopic potential measurements with an electron beam testing device
SIEMENS AG21 citations82
US4220854ASep 2, 1980
Method for the contactless measurement of the potential waveform in an electronic component and apparatus for implementing the method
SIEMENS AG29 citations82
US4733176AMar 22, 1988
Method and apparatus for locating defects in an electrical circuit with a light beam
SIEMENS AG8 citations74
US4539477ASep 3, 1985
Method and apparatus for suppressing disturbances in the measurement of signals with a particle probe
SIEMENS AG9 citations74
US4514682AApr 30, 1985
Secondary electron spectrometer for measuring voltages on a sample utilizing an electron probe
SIEMENS AG9 citations74
US4486660ADec 4, 1984
Electron beam testing device for stroboscopic measurement of high-frequency, periodic events
SIEMENS AG14 citations74
US4169229ASep 25, 1979
Apparatus for keying in electron beams
SIEMENS AG16 citations74
US4686466AAug 11, 1987
Method for automatically setting the voltage resolution in particle beam measuring devices and apparatus for implementation thereof
SIEMENS AG4 citations63
US4675602AJun 23, 1987
Method for automatically setting an operating point given signal curve measurements with a particle beam measuring apparatus
SIEMENS AG4 citations63
US4651003AMar 17, 1987
Particle-accelerating electrode
SIEMENS AG4 citations63
US4471302ASep 11, 1984
Method for representing logical status changes of a plurality of adjacent circuit nodes in an integrated circuit in a logic image employing a pulsed electron probe
SIEMENS AG5 citations62
INTEGRATED CIRCUIT TESTING
11 patentsUS7274018B2Sep 25, 2007
Charged particle beam apparatus and method for operating the same
INTEGRATED CIRCUIT TESTING162 citations98
US7045781B2May 16, 2006
Charged particle beam apparatus and method for operating the same
INTEGRATED CIRCUIT TESTING214 citations98
US6943349B2Sep 13, 2005
Multi beam charged particle device
INTEGRATED CIRCUIT TESTING126 citations97
US5041724AAug 20, 1991
Method of operating an electron beam measuring device
INTEGRATED CIRCUIT TESTING29 citations93
US7586093B2Sep 8, 2009
Apparatus and method for inspecting a sample of a specimen by means of an electron beam
INTEGRATED CIRCUIT TESTING19 citations92
US6936817B2Aug 30, 2005
Optical column for charged particle beam device
INTEGRATED CIRCUIT TESTING27 citations92
US6730907B1May 4, 2004
Charged particle device
INTEGRATED CIRCUIT TESTING33 citations92
US5329125AJul 12, 1994
Device for corpuscular-optical examination and/or processing of material samples
INTEGRATED CIRCUIT TESTING26 citations92
US7652263B2Jan 26, 2010
Focussing lens for charged particle beams
INTEGRATED CIRCUIT TESTING18 citations84
US7638777B2Dec 29, 2009
Imaging system with multi source array
INTEGRATED CIRCUIT TESTING8 citations81
US4683376AJul 28, 1987
Opposing field spectrometer for electron beam mensuration technology
INTEGRATED CIRCUIT TESTING14 citations74
APPLIED MATERIALS INC
5 patentsUS6555815B2Apr 29, 2003
Apparatus and method for examining specimen with a charged particle beam
APPLIED MATERIALS INC41 citations93
US6576908B1Jun 10, 2003
Beam column for charged particle beam device
APPLIED MATERIALS INC20 citations92
US6740889B1May 25, 2004
Charged particle beam microscope with minicolumn
APPLIED MATERIALS INC6 citations74
US6555824B1Apr 29, 2003
Method and device for focusing a charged particle beam
APPLIED MATERIALS INC10 citations74
US7075092B2Jul 11, 2006
Charged particle beam microscope with minicolumn
APPLIED MATERIALS INC2 citations63