Inventor
MUNACK HARRY
DE5 patents
⚠️ This page may combine multiple inventors who share the name “MUNACK HARRY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEGRATED CIRCUIT TESTING
4 patentsUS7274018B2Sep 25, 2007
Charged particle beam apparatus and method for operating the same
INTEGRATED CIRCUIT TESTING162 citations98
US7045781B2May 16, 2006
Charged particle beam apparatus and method for operating the same
INTEGRATED CIRCUIT TESTING214 citations98
US6943349B2Sep 13, 2005
Multi beam charged particle device
INTEGRATED CIRCUIT TESTING126 citations97
US7075075B2Jul 11, 2006
Charged particle deflecting system
INTEGRATED CIRCUIT TESTING16 citations83