Inventor
BOUMATAR KAREEM
US5 patents
Patents
5 patentsUS9328416B2May 3, 2016
Method for the reduction of defectivity in vapor deposited films
LAM RES CORP17 citations82
US10081869B2Sep 25, 2018
Defect control in RF plasma substrate processing systems using DC bias voltage during movement of substrates
LAM RES CORP9 citations78
US10704149B2Jul 7, 2020
Defect control and stability of DC bias in RF plasma-based substrate processing systems using molecular reactive purge gas
LAM RES CORP2 citations68
US10047438B2Aug 14, 2018
Defect control and stability of DC bias in RF plasma-based substrate processing systems using molecular reactive purge gas
LAM RES CORP3 citations66
US12522927B2Jan 13, 2026
DC bias circuit and gas delivery system for substrate processing systems
LAM RES CORP0 citations57