Inventor
VAN DER HEIJDEN MARCUS THEODOOR WILHELMUS
BE4 patents
⚠️ This page may combine multiple inventors who share the name “VAN DER HEIJDEN MARCUS THEODOOR WILHELMUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VAN DER HEIJDEN MARCUS THEODOOR WILHELMUS
3 patentsUS8114568B2Feb 14, 2012
Method of preparing a substrate for lithography, a substrate, a device manufacturing method, a sealing coating applicator and a sealing coating measurement apparatus
VAN DER HEIJDEN MARCUS THEODOOR WILHELMUS12 citations77
US8394572B2Mar 12, 2013
Method of preparing a substrate for lithography, a substrate, a device manufacturing method, a sealing coating applicator and a sealing coating measurement apparatus
VAN DER HEIJDEN MARCUS THEODOOR WILHELMUS0 citations45
US8648997B2Feb 11, 2014
Member with a cleaning surface and a method of removing contamination
VAN DER HEIJDEN MARCUS THEODOOR WILHELMUS0 citations36