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Inventor

MORSE PATRICK LAWRENCE

US10 patents
⚠️ This page may combine multiple inventors who share the name “MORSE PATRICK LAWRENCE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SPUTTERING COMPONENTS INC

6 patents
US9312108B2Apr 12, 2016

Sputtering apparatus

SPUTTERING COMPONENTS INC2 citations58
US9406487B2Aug 2, 2016

Plasma enhanced chemical vapor deposition (PECVD) source

SPUTTERING COMPONENTS INC2 citations55
US9198274B2Nov 24, 2015

Ion control for a plasma source

SPUTTERING COMPONENTS INC1 citations48
US10727034B2Jul 28, 2020

Magnetic force release for sputtering sources with magnetic target materials

SPUTTERING COMPONENTS INC0 citations38
US9758862B2Sep 12, 2017

Sputtering apparatus

SPUTTERING COMPONENTS INC0 citations38
US9418823B2Aug 16, 2016

Sputtering apparatus

SPUTTERING COMPONENTS INC0 citations36

MADOCKS JOHN E

1 patent
US9388490B2Jul 12, 2016

Rotary magnetron magnet bar and apparatus containing the same for high target utilization

MADOCKS JOHN E3 citations68

BUEHLER AG

1 patent
US10699885B2Jun 30, 2020

Dual power feed rotary sputtering cathode

BUEHLER AG1 citations59

MADOCKS JOHN

1 patent
US8535490B2Sep 17, 2013

Rotatable magnetron sputtering with axially movable target electrode tube

MADOCKS JOHN2 citations59

GENERAL PLASMA INC

1 patent
US10273570B2Apr 30, 2019

Rotary magnetron magnet bar and apparatus containing the same for high target utilization

GENERAL PLASMA INC0 citations49