Inventor

GERMAN JOHN ROBERT

US3 patents

Patents

3 patents

US9312108B2Apr 12, 2016

Sputtering apparatus

SPUTTERING COMPONENTS INC2 citations58

US9406487B2Aug 2, 2016

Plasma enhanced chemical vapor deposition (PECVD) source

SPUTTERING COMPONENTS INC2 citations55

US9418823B2Aug 16, 2016

Sputtering apparatus

SPUTTERING COMPONENTS INC0 citations36