Inventor
CHOU CHIH-SHIANG
TW11 patents
⚠️ This page may combine multiple inventors who share the name “CHOU CHIH-SHIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
6 patentsUS10495967B2Dec 3, 2019
Method of mask simulation model for OPC and mask making
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations83
US10866397B2Dec 15, 2020
Microscope apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US10962875B2Mar 30, 2021
Method of mask simulation model for OPC and mask making
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11619806B2Apr 4, 2023
Microscope apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US9880460B2Jan 30, 2018
Enhanced EUV lithography system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10295813B2May 21, 2019
Microscope apparatus and method for phase image acquisition
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49