Inventor

LAI JUN-CHENG

TW5 patents

⚠️ This page may combine multiple inventors who share the name “LAI JUN-CHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WORLDWIDE SEMICONDUCTOR MFG

2 patents

US6187486B1Feb 13, 2001

Method of multi-exposure for improving photolithography resolution

WORLDWIDE SEMICONDUCTOR MFG18 citations82

US6200708B1Mar 13, 2001

Method for automatically determining adjustments for stepping photolithography exposures

WORLDWIDE SEMICONDUCTOR MFG5 citations57

POWERCHIP SEMICONDUCTOR CORP

2 patents

US7008733B2Mar 7, 2006

Method of improving a resolution of contact hole patterns by utilizing alternate phase shift principle

POWERCHIP SEMICONDUCTOR CORP2 citations57

US7461472B2Dec 9, 2008

Half-tone phase shift mask and patterning method using thereof

POWERCHIP SEMICONDUCTOR CORP0 citations47

POWERCHIP TECH CORP

1 patent

US9508138B2Nov 29, 2016

Method of detecting photolithographic hotspots

POWERCHIP TECH CORP0 citations40