Inventor
ZHANG YITING
US10 patents
⚠️ This page may combine multiple inventors who share the name “ZHANG YITING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
6 patentsUS9991128B2Jun 5, 2018
Atomic layer etching in continuous plasma
LAM RES CORP26 citations93
US10410832B2Sep 10, 2019
Control of on-wafer CD uniformity with movable edge ring and gas injection adjustment
LAM RES CORP8 citations83
US10242845B2Mar 26, 2019
Near-substrate supplemental plasma density generation with low bias voltage within inductively coupled plasma processing chamber
LAM RES CORP2 citations73
US11424103B2Aug 23, 2022
Control of on-wafer cd uniformity with movable edge ring and gas injection adjustment
LAM RES CORP0 citations62
US9852924B1Dec 26, 2017
Line edge roughness improvement with sidewall sputtering
LAM RES CORP1 citations51
US11538666B2Dec 27, 2022
Multi-zone cooling of plasma heated window
LAM RES CORP0 citations50