Inventor
BINGHAM AARON
US9 patents
⚠️ This page may combine multiple inventors who share the name “BINGHAM AARON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
8 patentsUS10991550B2Apr 27, 2021
Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
LAM RES CORP7 citations81
US11236422B2Feb 1, 2022
Multi zone substrate support for ALD film property correction and tunability
LAM RES CORP3 citations70
US12209312B2Jan 28, 2025
Temperature control of a multi-zone pedestal
LAM RES CORP0 citations60
US12586757B2Mar 24, 2026
Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
LAM RES CORP0 citations59
US11594397B2Feb 28, 2023
Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
LAM RES CORP0 citations59
US10879092B2Dec 29, 2020
Fault detection using showerhead voltage variation
LAM RES CORP0 citations51
US10043690B2Aug 7, 2018
Fault detection using showerhead voltage variation
LAM RES CORP0 citations51
US10777386B2Sep 15, 2020
Methods for controlling plasma glow discharge in a plasma chamber
LAM RES CORP0 citations39