Inventor
BEINTNER JOCHEN C
US5 patents
Patents
5 patentsUS7018551B2Mar 28, 2006
Pull-back method of forming fins in FinFets
IBM84 citations97
US7087532B2Aug 8, 2006
Formation of controlled sublithographic structures
IBM22 citations92
US6933183B2Aug 23, 2005
Selfaligned source/drain FinFET process flow
IBM21 citations91
US7087471B2Aug 8, 2006
Locally thinned fins
IBM43 citations90
US6924178B2Aug 2, 2005
Oxide/nitride stacked in FinFET spacer process
IBM49 citations90