Inventor
MANUMPIL MARY ANNE
US6 patents
Patents
6 patentsUS11988965B2May 21, 2024
Underlayer for photoresist adhesion and dose reduction
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US11314168B2Apr 26, 2022
Underlayer for photoresist adhesion and dose reduction
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US12474638B2Nov 18, 2025
Underlayer for photoresist adhesion and dose reduction
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US12062537B2Aug 13, 2024
High etch selectivity, low stress ashable carbon hard mask
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US12586765B2Mar 24, 2026
Surface modification for metal-containing photoresist deposition
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US12435412B2Oct 7, 2025
High density, modulus, and hardness amorphous carbon films at low pressure
LAM RES CORP0 citations44