Inventor

FUKUYAMA RYOUJI

JP3 patents

Patents

3 patents

US7009714B2Mar 7, 2006

Method of dry etching a sample and dry etching system

HITACHI HIGH TECH CORP7 citations70

US7122479B2Oct 17, 2006

Etching processing method

HITACHI HIGH TECH CORP4 citations60

US7026252B2Apr 11, 2006

Etching aftertreatment method

HITACHI HIGH TECH CORP0 citations39