Inventor
YAKUSHIJI MAMORU
JP13 patents
⚠️ This page may combine multiple inventors who share the name “YAKUSHIJI MAMORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
7 patentsUS8889024B2Nov 18, 2014
Plasma etching method
HITACHI HIGH TECH CORP17 citations92
US7009714B2Mar 7, 2006
Method of dry etching a sample and dry etching system
HITACHI HIGH TECH CORP7 citations70
US12142489B2Nov 12, 2024
Semiconductor device manufacturing method and plasma processing method
HITACHI HIGH TECH CORP0 citations61
US7122479B2Oct 17, 2006
Etching processing method
HITACHI HIGH TECH CORP4 citations60
US8741166B2Jun 3, 2014
Plasma etching method
HITACHI HIGH TECH CORP0 citations51
US11887814B2Jan 30, 2024
Plasma processing method
HITACHI HIGH TECH CORP0 citations45
US7026252B2Apr 11, 2006
Etching aftertreatment method
HITACHI HIGH TECH CORP0 citations39