Inventor
OOSTERLAKEN THEODORUS
NL8 patents
Patents
8 patentsUS10103040B1Oct 16, 2018
Apparatus and method for manufacturing a semiconductor device
ASM IP HOLDING BV466 citations96
US11232963B2Jan 25, 2022
Substrate processing apparatus and method
ASM IP HOLDING BV6 citations72
US11735445B2Aug 22, 2023
Substrate processing apparatus for processing substrates
ASM IP HOLDING BV2 citations70
US11230766B2Jan 25, 2022
Substrate processing apparatus and method
ASM IP HOLDING BV3 citations70
US11087997B2Aug 10, 2021
Substrate processing apparatus for processing substrates
ASM IP HOLDING BV3 citations70
US11024523B2Jun 1, 2021
Substrate processing apparatus and method
ASM IP HOLDING BV2 citations70
US11804388B2Oct 31, 2023
Substrate processing apparatus and method
ASM IP HOLDING BV0 citations60
US12183602B2Dec 31, 2024
Substrate processing apparatus for processing substrates
ASM IP HOLDING BV0 citations59