Inventor
DE LEGA XAVIER COLONNA
US38 patents
⚠️ This page may combine multiple inventors who share the name “DE LEGA XAVIER COLONNA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZYGO CORP
35 patentsUS6195168B1Feb 27, 2001
Infrared scanning interferometry apparatus and method
ZYGO CORP180 citations99
US7428057B2Sep 23, 2008
Interferometer for determining characteristics of an object surface, including processing and calibration
ZYGO CORP75 citations98
US7324210B2Jan 29, 2008
Scanning interferometry for thin film thickness and surface measurements
ZYGO CORP103 citations98
US7046371B2May 16, 2006
Interferometer having a coupled cavity geometry for use with an extended source
ZYGO CORP63 citations98
US6714307B2Mar 30, 2004
Measurement of complex surface shapes using a spherical wavefront
ZYGO CORP92 citations98
US7106454B2Sep 12, 2006
Profiling complex surface structures using scanning interferometry
ZYGO CORP87 citations97
US7012700B2Mar 14, 2006
Interferometric optical systems having simultaneously scanned optical path length and focus
ZYGO CORP138 citations97
US7616323B2Nov 10, 2009
Interferometer with multiple modes of operation for determining characteristics of an object surface
ZYGO CORP37 citations96
US7446882B2Nov 4, 2008
Interferometer for determining characteristics of an object surface
ZYGO CORP45 citations96
US7324214B2Jan 29, 2008
Interferometer and method for measuring characteristics of optically unresolved surface features
ZYGO CORP102 citations96
US7292346B2Nov 6, 2007
Triangulation methods and systems for profiling surfaces through a thin film coating
ZYGO CORP27 citations96
US7271918B2Sep 18, 2007
Profiling complex surface structures using scanning interferometry
ZYGO CORP57 citations96
US7239398B2Jul 3, 2007
Profiling complex surface structures using height scanning interferometry
ZYGO CORP36 citations96
US6822745B2Nov 23, 2004
Optical systems for measuring form and geometric dimensions of precision engineered parts
ZYGO CORP97 citations96
US6597460B2Jul 22, 2003
Height scanning interferometer for determining the absolute position and surface profile of an object with respect to a datum
ZYGO CORP78 citations96
US7884947B2Feb 8, 2011
Interferometry for determining characteristics of an object surface, with spatially coherent illumination
ZYGO CORP26 citations93
US7636168B2Dec 22, 2009
Interferometry method and system including spectral decomposition
ZYGO CORP20 citations93
US7304747B2Dec 4, 2007
Methods and systems for determining optical properties using low-coherence interference signals
ZYGO CORP28 citations93
US7142311B2Nov 28, 2006
Methods and systems for determining optical properties using low-coherence interference signals
ZYGO CORP33 citations93
US7030996B2Apr 18, 2006
Measurement of complex surface shapes using a spherical wavefront
ZYGO CORP21 citations93
US6226092B1May 1, 2001
Full-field geometrically desensitized interferometer using refractive optics
ZYGO CORP40 citations93
US6072581AJun 6, 2000
Geometrically-desensitized interferometer incorporating an optical assembly with high stray-beam management capability
ZYGO CORP47 citations93
US8379218B2Feb 19, 2013
Fiber-based interferometer system for monitoring an imaging interferometer
ZYGO CORP20 citations92
US7978338B2Jul 12, 2011
Compound reference interferometer
ZYGO CORP14 citations92
US7948636B2May 24, 2011
Interferometer and method for measuring characteristics of optically unresolved surface features
ZYGO CORP17 citations92
US7684049B2Mar 23, 2010
Interferometer and method for measuring characteristics of optically unresolved surface features
ZYGO CORP18 citations92
US7466429B2Dec 16, 2008
Profiling complex surface structures using scanning interferometry
ZYGO CORP14 citations92
US7289224B2Oct 30, 2007
Low coherence grazing incidence interferometry for profiling and tilt sensing
ZYGO CORP16 citations92
US7102761B2Sep 5, 2006
Scanning interferometry
ZYGO CORP39 citations92
US7978337B2Jul 12, 2011
Interferometer utilizing polarization scanning
ZYGO CORP8 citations84
US7889355B2Feb 15, 2011
Interferometry for lateral metrology
ZYGO CORP7 citations84
US7023562B2Apr 4, 2006
Characterization of period variations in diffraction gratings
ZYGO CORP17 citations84
US7212291B2May 1, 2007
Interferometric microscopy using reflective optics for complex surface shapes
ZYGO CORP15 citations77
US7952724B2May 31, 2011
Interferometer with multiple modes of operation for determining characteristics of an object surface
ZYGO CORP4 citations74
US7126698B2Oct 24, 2006
Measurement of complex surface shapes using a spherical wavefront
ZYGO CORP4 citations63