Inventor
KRISHNAMURTHY RAMESH
US11 patents
⚠️ This page may combine multiple inventors who share the name “KRISHNAMURTHY RAMESH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS7431795B2Oct 7, 2008
Cluster tool and method for process integration in manufacture of a gate structure of a field effect transistor
APPLIED MATERIALS INC14 citations83
US7354866B2Apr 8, 2008
Cluster tool and method for process integration in manufacture of a gate structure of a field effect transistor
APPLIED MATERIALS INC2 citations62
US11908718B2Feb 20, 2024
In-situ metrology and process control
APPLIED MATERIALS INC0 citations61
US11289352B2Mar 29, 2022
In-situ metrology and process control
APPLIED MATERIALS INC0 citations61
US7829243B2Nov 9, 2010
Method for plasma etching a chromium layer suitable for photomask fabrication
APPLIED MATERIALS INC4 citations60
US9793132B1Oct 17, 2017
Etch mask for hybrid laser scribing and plasma etch wafer singulation process
APPLIED MATERIALS INC1 citations52