Inventor
WOLF THOMAS MICHAEL
US4 patents
⚠️ This page may combine multiple inventors who share the name “WOLF THOMAS MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AGERE SYSTEMS INC
3 patentsUS6985229B2Jan 10, 2006
Overlay metrology using scatterometry profiling
AGERE SYSTEMS INC47 citations88
US7160799B2Jan 9, 2007
Define via in dual damascene process
AGERE SYSTEMS INC4 citations60
US6559062B1May 6, 2003
Method for avoiding notching in a semiconductor interconnect during a metal etching step
AGERE SYSTEMS INC3 citations57