Inventor

TAKIJIRI KOTARO

JP17 patents

⚠️ This page may combine multiple inventors who share the name “TAKIJIRI KOTARO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAKIJIRI KOTARO

HORIBA STEC CO LTD

Pressure control device, flow rate control device and recording medium having programs used for pressure control device, recording medium having programs used for flow rate control device

Flow-rate control device and flow-rate control program

Flow rate control apparatus, storage medium storing program for flow rate control apparatus and flow rate control method

Gas control system and program for gas control system

Flow control device, diagnostic method, and program for flow control device

Wafer temperature control device, wafer temperature control method, and wafer temperature control program

Flow rate controller and recording medium recorded with program for flow rate controller

Flow rate control apparatus, flow rate control method, and program recording medium in which program for flow rate control apparatus is recorded

Flow rate ratio control system, film forming system, abnormality diagnosis method, and abnormality diagnosis program medium

Fluid control device and flow rate ratio control device

Concentration control system, concentration control method and program for a concentration control system

Flow rate control device

Residual gas analyzer

Power supply apparatus of fluid control and measurement system

Fluid control and measurement system with a relay

MINAMI MASAKAZU

Material gas concentration control system

HORIBA LTD

Fluid control apparatus and flow rate ratio control apparatus