Inventor
SANO SHUNICHI
9 patents
⚠️ This page may combine multiple inventors who share the name “SANO SHUNICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO SHIBAURA ELECTRIC CO
7 patentsUS4480284AOct 30, 1984
Electrostatic chuck plate
TOKYO SHIBAURA ELECTRIC CO470 citations98
US4621371ANov 4, 1986
Method of forming by projection an integrated circuit pattern on a semiconductor wafer
TOKYO SHIBAURA ELECTRIC CO26 citations90
US4647782AMar 3, 1987
Charged particle beam exposure apparatus
TOKYO SHIBAURA ELECTRIC CO19 citations73
US4116658ASep 26, 1978
Method of coating substrate for liquid crystal display device
TOKYO SHIBAURA ELECTRIC CO12 citations72
US4048633ASep 13, 1977
Liquid crystal driving system
TOKYO SHIBAURA ELECTRIC CO17 citations72
US3975766AAug 17, 1976
Color television receiver
TOKYO SHIBAURA ELECTRIC CO15 citations66
US4034324AJul 5, 1977
Deflection device for use in color television receiver
TOKYO SHIBAURA ELECTRIC CO6 citations58