Inventor
LEE EDDIE C
US5 patents
Patents
5 patentsUS4584079AApr 22, 1986
Step shape tailoring by phase angle variation RF bias sputtering
HONEYWELL INC27 citations90
US4732658AMar 22, 1988
Planarization of silicon semiconductor devices
HONEYWELL INC25 citations89
US4717449AJan 5, 1988
Dielectric barrier material
HONEYWELL INC14 citations70
US4713682ADec 15, 1987
Dielectric barrier material
HONEYWELL INC9 citations70
US4662989AMay 5, 1987
High efficiency metal lift-off process
HONEYWELL INC11 citations67