Inventor
BUIS EDWIN J
NL5 patents
⚠️ This page may combine multiple inventors who share the name “BUIS EDWIN J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
3 patentsUS6657204B2Dec 2, 2003
Cooling of voice coil motors in lithographic projection apparatus
ASML NETHERLANDS BV19 citations88
US6498350B2Dec 24, 2002
Crash prevention in positioning apparatus for use in lithographic projection apparatus
ASML NETHERLANDS BV32 citations88
US7057313B2Jun 6, 2006
Cooling of voice coil motors
ASML NETHERLANDS BV10 citations69