Inventor
DALTON TIMOTHY JOSEPH
US34 patents
⚠️ This page may combine multiple inventors who share the name “DALTON TIMOTHY JOSEPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
31 patentsUS6451712B1Sep 17, 2002
Method for forming a porous dielectric material layer in a semiconductor device and device formed
IBM123 citations99
US7531407B2May 12, 2009
Semiconductor integrated circuit devices having high-Q wafer backside inductors and methods of fabricating same
IBM61 citations98
US7193423B1Mar 20, 2007
Wafer-to-wafer alignments
IBM231 citations98
US6815329B2Nov 9, 2004
Multilayer interconnect structure containing air gaps and method for making
IBM105 citations97
US7285477B1Oct 23, 2007
Dual wired integrated circuit chips
IBM49 citations96
US8013342B2Sep 6, 2011
Double-sided integrated circuit chips
IBM19 citations92
US7851321B2Dec 14, 2010
Semiconductor integrated circuit devices having high-Q wafer back-side capacitors
IBM16 citations92
US7670927B2Mar 2, 2010
Double-sided integrated circuit chips
IBM15 citations92
US7473979B2Jan 6, 2009
Semiconductor integrated circuit devices having high-Q wafer back-side capacitors
IBM18 citations92
US7365001B2Apr 29, 2008
Interconnect structures and methods of making thereof
IBM35 citations92
US7282802B2Oct 16, 2007
Modified via bottom structure for reliability enhancement
IBM24 citations92
US7098476B2Aug 29, 2006
Multilayer interconnect structure containing air gaps and method for making
IBM39 citations92
US6548901B1Apr 15, 2003
Cu/low-k BEOL with nonconcurrent hybrid dielectric interface
IBM22 citations92
US7943412B2May 17, 2011
Low temperature Bi-CMOS compatible process for MEMS RF resonators and filters
IBM24 citations91
US7282148B2Oct 16, 2007
Porous silicon composite structure as large filtration array
IBM32 citations91
US7060624B2Jun 13, 2006
Deep filled vias
IBM28 citations91
US6784485B1Aug 31, 2004
Diffusion barrier layer and semiconductor device containing same
IBM25 citations91
US7084479B2Aug 1, 2006
Line level air gaps
IBM27 citations90
US7960245B2Jun 14, 2011
Dual wired integrated circuit chips
IBM12 citations84
US7923712B2Apr 12, 2011
Phase change memory element with a peripheral connection to a thin film electrode
IBM17 citations83
US7526698B2Apr 28, 2009
Error detection and correction in semiconductor structures
IBM12 citations82
US7358182B2Apr 15, 2008
Method of forming an interconnect structure
IBM11 citations78
US7939914B2May 10, 2011
Dual wired integrated circuit chips
IBM4 citations74
US6831364B2Dec 14, 2004
Method for forming a porous dielectric material layer in a semiconductor device and device formed
IBM6 citations74
US6724069B2Apr 20, 2004
Spin-on cap layer, and semiconductor device containing same
IBM12 citations73
US6657305B1Dec 2, 2003
Semiconductor recessed mask interconnect technology
IBM12 citations72
US7381627B2Jun 3, 2008
Dual wired integrated circuit chips
IBM3 citations63
US7014958B2Mar 21, 2006
Method for dry etching photomask material
IBM2 citations60
US7906428B2Mar 15, 2011
Modified via bottom structure for reliability enhancement
IBM1 citations52
US7344965B2Mar 18, 2008
Method of etching dual pre-doped polysilicon gate stacks using carbon-containing gaseous additions
IBM1 citations52
US7115921B2Oct 3, 2006
Nano-scaled gate structure with self-interconnect capabilities
IBM0 citations42