Inventor
KUMAR KAUSHIK
US12 patents
⚠️ This page may combine multiple inventors who share the name “KUMAR KAUSHIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
7 patentsUS6975032B2Dec 13, 2005
Copper recess process with application to selective capping and electroless plating
IBM85 citations97
US7064064B2Jun 20, 2006
Copper recess process with application to selective capping and electroless plating
IBM22 citations92
US7052621B2May 30, 2006
Bilayered metal hardmasks for use in Dual Damascene etch schemes
IBM15 citations92
US7241681B2Jul 10, 2007
Bilayered metal hardmasks for use in dual damascene etch schemes
IBM13 citations83
US7091612B2Aug 15, 2006
Dual damascene structure and method
IBM8 citations73
US7125792B2Oct 24, 2006
Dual damascene structure and method
IBM8 citations72
US7888252B2Feb 15, 2011
Self-aligned contact
IBM4 citations62
TOKYO ELECTRON LTD
4 patentsUS8945408B2Feb 3, 2015
Etch process for reducing directed self assembly pattern defectivity
TOKYO ELECTRON LTD6 citations70
US9653319B2May 16, 2017
Method for using post-processing methods for accelerating EUV lithography
TOKYO ELECTRON LTD1 citations51
US12438038B2Oct 7, 2025
Forming vias in a semiconductor device
TOKYO ELECTRON LTD0 citations44
US10600687B2Mar 24, 2020
Process integration techniques using a carbon layer to form self-aligned structures
TOKYO ELECTRON LTD0 citations41