Inventor
SIMON ANDREW HERBERT
US14 patents
⚠️ This page may combine multiple inventors who share the name “SIMON ANDREW HERBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
13 patentsUS6949461B2Sep 27, 2005
Method for depositing a metal layer on a semiconductor interconnect structure
IBM37 citations92
US7446036B1Nov 4, 2008
Gap free anchored conductor and dielectric structure and method for fabrication thereof
IBM42 citations91
US6380075B1Apr 30, 2002
Method for forming an open-bottom liner for a conductor in an electronic structure and device formed
IBM36 citations91
US6238532B1May 29, 2001
Radio-frequency coil for use in an ionized physical vapor deposition apparatus
IBM22 citations91
US6176931B1Jan 23, 2001
Wafer clamp ring for use in an ionized physical vapor deposition apparatus
IBM28 citations91
US11456415B2Sep 27, 2022
Phase change memory cell with a wrap around and ring type of electrode contact and a projection liner
IBM4 citations73
US11476418B2Oct 18, 2022
Phase change memory cell with a projection liner
IBM2 citations72
US6661097B1Dec 9, 2003
Ti liner for copper interconnect with low-k dielectric
IBM7 citations72
US11930724B2Mar 12, 2024
Phase change memory cell spacer
IBM2 citations71
US12557564B2Feb 17, 2026
Memory cell with a variable element and a phase change memory
IBM0 citations62
US7985928B2Jul 26, 2011
Gap free anchored conductor and dielectric structure and method for fabrication thereof
IBM3 citations62
US11980111B2May 7, 2024
Confined bridge cell phase change memory
IBM0 citations61
US6660330B2Dec 9, 2003
Method for depositing metal films onto substrate surfaces utilizing a chamfered ring support
IBM6 citations61