Inventor
MATSUMOTO YUKAKO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “MATSUMOTO YUKAKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
4 patentsUS6411368B1Jun 25, 2002
Projection exposure method, projection exposure apparatus, and methods of manufacturing and optically cleaning the exposure apparatus
NIKON CORP53 citations94
US5430303AJul 4, 1995
Exposure apparatus
NIKON CORP85 citations94
US6538722B2Mar 25, 2003
Projection exposure method, projection exposure apparatus, and methods of manufacturing and optically cleaning the exposure apparatus
NIKON CORP21 citations91
US8055071B2Nov 8, 2011
Image processing apparatus, imaging apparatus and recording medium storing image processing program
NIKON CORP0 citations49