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Inventor
ISHIHARA YASUMASA
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “ISHIHARA YASUMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
2 patents
US5611655A
Mar 18, 1997
Vacuum process apparatus and vacuum processing method
TOKYO ELECTRON LTD
143 citations
94
US10081090B2
Sep 25, 2018
Method of manufacturing an upper electrode of a plasma processing device
TOKYO ELECTRON LTD
0 citations
39
NIPPON SOKEN
1 patent
US4329047A
May 11, 1982
Optical velocity measuring apparatus of non-contact measurement type
NIPPON SOKEN
15 citations
72
SEIKO EPSON CORP
1 patent
US7480087B2
Jan 20, 2009
Apparatus for and method of forming images with oscillation mirror
SEIKO EPSON CORP
1 citations
51