Inventor
KYSER DAVID F
US4 patents
Patents
4 patentsUS5655110AAug 5, 1997
Method for setting and adjusting process parameters to maintain acceptable critical dimensions across each die of mass-produced semiconductor wafers
ADVANCED MICRO DEVICES INC284 citations97
US5646870AJul 8, 1997
Method for setting and adjusting process parameters to maintain acceptable critical dimensions across each die of mass-produced semiconductor wafers
ADVANCED MICRO DEVICES INC164 citations97
US5539247AJul 23, 1996
Selective metal via plug growth technology for deep sub-micrometer ULSI
ADVANCED MICRO DEVICES INC13 citations73
US5453402ASep 26, 1995
Selective metal via plug growth technology for deep sub-micrometer ULSI
ADVANCED MICRO DEVICES INC5 citations62