Inventor
FLIETNER BERTRAND
DE7 patents
⚠️ This page may combine multiple inventors who share the name “FLIETNER BERTRAND”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SIEMENS AG
6 patentsUS6537418B1Mar 25, 2003
Spatially uniform gas supply and pump configuration for large wafer diameters
SIEMENS AG63 citations95
US6140833AOct 31, 2000
In-situ measurement method and apparatus for semiconductor processing
SIEMENS AG38 citations92
US6103585AAug 15, 2000
Method of forming deep trench capacitors
SIEMENS AG39 citations91
US5786235AJul 28, 1998
Process for depositing a surface-wide layer through a mask and optionally closing said mask
SIEMENS AG20 citations89
US6124206ASep 26, 2000
Reduced pad erosion
SIEMENS AG25 citations88
US6699794B1Mar 2, 2004
Self aligned buried plate
SIEMENS AG17 citations83