Inventor
CHEN STEVEN AIHUA
US4 patents
Patents
4 patentsUS6423949B1Jul 23, 2002
Multi-zone resistive heater
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US5837058ANov 17, 1998
High temperature susceptor
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US6066836AMay 23, 2000
High temperature resistive heater for a process chamber
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US6646235B2Nov 11, 2003
Multi-zone resistive heater
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