Inventor

NISHINO KOUJI

JP154 patents

⚠️ This page may combine multiple inventors who share the name “NISHINO KOUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NISHINO KOUJI

FUJIKIN KK

Pressure-type flow rate control apparatus

Valve with an integral orifice

Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus

Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus

Fluid-switchable flow rate control system

Method and apparatus for detection of orifice clogging in pressure-type flow rate controllers

Gas supply system equipped with pressure-type flow rate control unit

Fluid supply apparatus

Pressure type flow control system with flow monitoring

Valve with an integral orifice

Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus

Orifice for pressure type flow rate control unit and process for manufacturing orifice

Valve with built-in orifice, and pressure-type flow rate control device

Gas divided flow supplying apparatus for semiconductor manufacturing equipment

Pressure type flow control system with flow monitoring

Pressure-type flow control device and method for preventing overshooting at start of flow control performed by said device

Pressure type flow control system with flow monitoring, and method for detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the same

Variable orifice type pressure-controlled flow controller

Flow rate measurement device and flow rate measurement method for flow rate controller for gas supply device

Evaporation supply apparatus for raw material and automatic pressure regulating device used therewith

Method for detecting abnormality in fluid supply line using fluid control apparatus with pressure sensor

Corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed

Gas supply facility of a chamber and a method for an internal pressure control of the chamber for which the facility is employed

Differential pressure type flowmeter and differential pressure type flow controller

Corrosion resistant metal made thermal type mass flow rate sensor and a fluid supply device using the same

Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method

Structure or construction for mounting a pressure detector

Flow rate range variable type flow rate control apparatus

Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method

Automatic zero point correction device for a pressure sensor, a pressure control device and a pressure type flow rate control device

Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method

OHMI TADAHIRO

Method of detecting abnormalities in flow rate in pressure-type flow controller

Fluid control valve and fluid supply/exhaust system

Fluid control valve and fluid supply/exhaust system

Gasket type orifice and pressure type flow rate control apparatus for which the orifice is employed

Vaporizer

Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is used

Flow rate range variable type flow rate control apparatus

Solenoid valve

TOKYO ELECTRON LTD

Apparatus for the correction of temperature drift for pressure sensor, pressure control apparatus and pressure-type flow rate control apparatus

Method of supplying divided gas to a chamber from a gas supply apparatus equipped with a flow-rate control system

Pressure-type flow rate control apparatus

HIRATA KAORU

Flow rate ratio variable type fluid supply apparatus

Automatic pressure regulator for flow rate regulator

MATSUMOTO ATSUSHI

Normally open type piezoelectric element driven metal diaphragm control valve

NAGATA ATSUSHI

Gas supply apparatus equipped with vaporizer

UNIV TOKUSHIMA

Raw material fluid density detector

NAGASE MASAAKI

Calibration method and flow rate measurement method for flow rate controller for gas supply device

HIDAKA ATSUSHI

Piezoelectrically driven valve and piezoelectrically driven flow rate control device

DOHI RYOUSUKE

Cam valve