Inventor
KATS SEMYON L
US13 patents
⚠️ This page may combine multiple inventors who share the name “KATS SEMYON L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS6108189AAug 22, 2000
Electrostatic chuck having improved gas conduits
APPLIED MATERIALS INC255 citations99
US6721162B2Apr 13, 2004
Electrostatic chuck having composite dielectric layer and method of manufacture
APPLIED MATERIALS INC76 citations98
US6310755B1Oct 30, 2001
Electrostatic chuck having gas cavity and method
APPLIED MATERIALS INC325 citations98
US6538872B1Mar 25, 2003
Electrostatic chuck having heater and method
APPLIED MATERIALS INC123 citations97
US6490146B2Dec 3, 2002
Electrostatic chuck bonded to base with a bond layer and method
APPLIED MATERIALS INC88 citations97
US6490145B1Dec 3, 2002
Substrate support pedestal
APPLIED MATERIALS INC86 citations97
US7672110B2Mar 2, 2010
Electrostatic chuck having textured contact surface
APPLIED MATERIALS INC58 citations96
US6462928B1Oct 8, 2002
Electrostatic chuck having improved electrical connector and method
APPLIED MATERIALS INC65 citations96
US6414834B1Jul 2, 2002
Dielectric covered electrostatic chuck
APPLIED MATERIALS INC56 citations96
US7221553B2May 22, 2007
Substrate support having heat transfer system
APPLIED MATERIALS INC49 citations95
US7479464B2Jan 20, 2009
Low temperature aerosol deposition of a plasma resistive layer
APPLIED MATERIALS INC45 citations92
US7768765B2Aug 3, 2010
Substrate support having heat transfer system
APPLIED MATERIALS INC8 citations83