Inventor
SCHMITT JOHN VINCENT
US4 patents
Patents
4 patentsUS6402806B1Jun 11, 2002
Method for unreacted precursor conversion and effluent removal
APPLIED MATERIALS INC436 citations97
US6099649AAug 8, 2000
Chemical vapor deposition hot-trap for unreacted precursor conversion and effluent removal
APPLIED MATERIALS INC480 citations97
US6596085B1Jul 22, 2003
Methods and apparatus for improved vaporization of deposition material in a substrate processing system
APPLIED MATERIALS INC71 citations95
US5972117AOct 26, 1999
Method and apparatus for monitoring generation of liquid chemical vapor
APPLIED MATERIALS INC16 citations71