Inventor

BLEYLE GEORGE MICHAEL

US2 patents

Patents

2 patents

US6402806B1Jun 11, 2002

Method for unreacted precursor conversion and effluent removal

APPLIED MATERIALS INC436 citations97

US6099649AAug 8, 2000

Chemical vapor deposition hot-trap for unreacted precursor conversion and effluent removal

APPLIED MATERIALS INC480 citations97