Inventor
WANG JIANN-KWANG
TW5 patents
Patents
5 patentsUS5818716AOct 6, 1998
Dynamic lot dispatching required turn rate factory control system and method of operation thereof
TAIWAN SEMICONDUCTOR MFG526 citations96
US5180689AJan 19, 1993
Tapered opening sidewall with multi-step etching process
TAIWAN SEMICONDUCTOR MFG62 citations94
US6660638B1Dec 9, 2003
CMP process leaving no residual oxide layer or slurry particles
TAIWAN SEMICONDUCTOR MFG13 citations91
US7125802B2Oct 24, 2006
CMP process leaving no residual oxide layer or slurry particles
TAIWAN SEMICONDUCTOR MFG3 citations61
US6903019B2Jun 7, 2005
CMP process leaving no residual oxide layer or slurry particles
TAIWAN SEMICONDUCTOR MFG0 citations51