Inventor

SCHRIEVER GUIDO

DE11 patents

⚠️ This page may combine multiple inventors who share the name “SCHRIEVER GUIDO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

XTREME TECH GMBH

4 patents

US6894298B2May 17, 2005

Arrangement for generating extreme ultraviolet (EUV) radiation based on a gas discharge

XTREME TECH GMBH75 citations97

US6882704B2Apr 19, 2005

Radiation source for generating extreme ultraviolet radiation

XTREME TECH GMBH43 citations92

US6770896B2Aug 3, 2004

Method for generating extreme ultraviolet radiation based on a radiation-emitting plasma

XTREME TECH GMBH20 citations91

US6855932B2Feb 15, 2005

Detector arrangement for energy measurement of pulsed x-ray radiation

XTREME TECH GMBH3 citations62

LAMBDA PHYSIK AG

2 patents

US6804327B2Oct 12, 2004

Method and apparatus for generating high output power gas discharge based source of extreme ultraviolet radiation and/or soft x-rays

LAMBDA PHYSIK AG89 citations97

US6998620B2Feb 14, 2006

Stable energy detector for extreme ultraviolet radiation detection

LAMBDA PHYSIK AG16 citations83

FRAUNHOGER GES ZUR FOERDERUNG

1 patent

US6389106B1May 14, 2002

Method and device for producing extreme ultraviolet and soft X-rays from a gaseous discharge

FRAUNHOGER GES ZUR FOERDERUNG31 citations89

XTREME TECHNOLOGIES GBMH

1 patent

US6815900B2Nov 9, 2004

Radiation source with high average EUV radiation output

XTREME TECHNOLOGIES GBMH29 citations87

SCHRIEVER GUIDO

1 patent

US8147647B2Apr 3, 2012

Method and arrangement for cleaning optical surfaces in plasma-based radiation sources

SCHRIEVER GUIDO4 citations56

BOLSHUKHIN DENIS

1 patent

US8410422B2Apr 2, 2013

Method and arrangement for the adjustment of characteristics of a beam bundle of high-energy radiation emitted from a plasma

BOLSHUKHIN DENIS1 citations39

SCHUERMANN MAX CHRISTIAN

1 patent

US8610354B2Dec 17, 2013

Method and apparatus for the generation of short-wavelength radiation by means of a gas discharge-based high-frequency, high-current discharge

SCHUERMANN MAX CHRISTIAN0 citations29