Inventor

SHIMATANI SATOSHI

JP12 patents

⚠️ This page may combine multiple inventors who share the name “SHIMATANI SATOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO OHKA KOGYO CO LTD

9 patents

US7358028B2Apr 15, 2008

Chemically amplified positive photo resist composition and method for forming resist pattern

TOKYO OHKA KOGYO CO LTD10 citations83

US6492085B1Dec 10, 2002

Positive photoresist composition and process and synthesizing polyphenol compound

TOKYO OHKA KOGYO CO LTD10 citations73

US6921621B2Jul 26, 2005

Positive resist composition of chemical amplification type, resist coated material, method of forming resist pattern, and process for producing semiconductor device

TOKYO OHKA KOGYO CO LTD9 citations71

US6787290B2Sep 7, 2004

Positive-working photoresist composition and resist patterning method using same

TOKYO OHKA KOGYO CO LTD6 citations62

US7150956B2Dec 19, 2006

Chemical amplification type positive resist composition, resist laminated material, resist pattern forming method and method of manufacturing semiconductor device

TOKYO OHKA KOGYO CO LTD3 citations60

US6620978B2Sep 16, 2003

Positive photoresist composition and process for synthesizing polyphenol compound

TOKYO OHKA KOGYO CO LTD1 citations52

US10678129B2Jun 9, 2020

Composition for nanoimprint, cured product, pattern forming method, and article having pattern

TOKYO OHKA KOGYO CO LTD0 citations50

US7329478B2Feb 12, 2008

Chemical amplified positive photo resist composition and method for forming resist pattern

TOKYO OHKA KOGYO CO LTD0 citations40

US7192687B2Mar 20, 2007

Positive resist composition and method of forming resist pattern using same