Inventor
MASUJIMA MASAHIRO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “MASUJIMA MASAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
2 patentsUS7358028B2Apr 15, 2008
Chemically amplified positive photo resist composition and method for forming resist pattern
TOKYO OHKA KOGYO CO LTD10 citations83
US7329478B2Feb 12, 2008
Chemical amplified positive photo resist composition and method for forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations40