Inventor
NITTA KAZUYUKI
JP32 patents
⚠️ This page may combine multiple inventors who share the name “NITTA KAZUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
30 patentsUS5945517AAug 31, 1999
Chemical-sensitization photoresist composition
TOKYO OHKA KOGYO CO LTD305 citations96
US5736296AApr 7, 1998
Positive resist composition comprising a mixture of two polyhydroxystyrenes having different acid cleavable groups and an acid generating compound
TOKYO OHKA KOGYO CO LTD46 citations96
US5955240ASep 21, 1999
Positive resist composition
TOKYO OHKA KOGYO CO LTD23 citations92
US5948589ASep 7, 1999
Positive-working photoresist composition
TOKYO OHKA KOGYO CO LTD20 citations92
US5908730AJun 1, 1999
Chemical-sensitization photoresist composition
TOKYO OHKA KOGYO CO LTD35 citations92
US5817444AOct 6, 1998
Positive-working photoresist composition and multilayered resist material using the same
TOKYO OHKA KOGYO CO LTD35 citations92
US5800964ASep 1, 1998
Photoresist composition
TOKYO OHKA KOGYO CO LTD20 citations92
US7358028B2Apr 15, 2008
Chemically amplified positive photo resist composition and method for forming resist pattern
TOKYO OHKA KOGYO CO LTD10 citations83
US6605417B2Aug 12, 2003
Method for decreasing surface defects of patterned resist layer
TOKYO OHKA KOGYO CO LTD14 citations82
US5770343AJun 23, 1998
Positive-working photoresist composition
TOKYO OHKA KOGYO CO LTD15 citations82
US6159652ADec 12, 2000
Positive resist composition
TOKYO OHKA KOGYO CO LTD12 citations73
US5945248AAug 31, 1999
Chemical-sensitization positive-working photoresist composition
TOKYO OHKA KOGYO CO LTD14 citations73
US5874195AFeb 23, 1999
Positive-working photoresist composition
TOKYO OHKA KOGYO CO LTD9 citations73
US6638684B2Oct 28, 2003
Photosensitive laminate, process for forming resist pattern using same and positive resist composition
TOKYO OHKA KOGYO CO LTD7 citations72
US5728504AMar 17, 1998
Positive photoresist compositions and multilayer resist materials using the same
TOKYO OHKA KOGYO CO LTD15 citations72
US6921621B2Jul 26, 2005
Positive resist composition of chemical amplification type, resist coated material, method of forming resist pattern, and process for producing semiconductor device
TOKYO OHKA KOGYO CO LTD9 citations71
US6818380B2Nov 16, 2004
Method for the preparation of a semiconductor device
TOKYO OHKA KOGYO CO LTD4 citations62
US6787290B2Sep 7, 2004
Positive-working photoresist composition and resist patterning method using same
TOKYO OHKA KOGYO CO LTD6 citations62
US6777158B2Aug 17, 2004
Method for the preparation of a semiconductor device
TOKYO OHKA KOGYO CO LTD3 citations62
US6444394B1Sep 3, 2002
Positive-working photoresist composition
TOKYO OHKA KOGYO CO LTD5 citations62
US5856058AJan 5, 1999
Chemical-sensitization positive-working photoresist composition
TOKYO OHKA KOGYO CO LTD2 citations62
US5854357ADec 29, 1998
Process for the production of polyhydroxstyrene
TOKYO OHKA KOGYO CO LTD3 citations62
US7402372B2Jul 22, 2008
Positive resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD5 citations61
US7150956B2Dec 19, 2006
Chemical amplification type positive resist composition, resist laminated material, resist pattern forming method and method of manufacturing semiconductor device
TOKYO OHKA KOGYO CO LTD3 citations60
US7407739B2Aug 5, 2008
Resist developer and resist pattern formation method using same
TOKYO OHKA KOGYO CO LTD0 citations52
US7094924B2Aug 22, 2006
Method for decreasing surface defects of patterned resist layer
TOKYO OHKA KOGYO CO LTD1 citations51
US6677103B2Jan 13, 2004
Positive-working photoresist composition
TOKYO OHKA KOGYO CO LTD1 citations51
USRE38254ESep 16, 2003
Positive resist composition
TOKYO OHKA KOGYO CO LTD1 citations48
US7329478B2Feb 12, 2008
Chemical amplified positive photo resist composition and method for forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations40
US7192687B2Mar 20, 2007
Positive resist composition and method of forming resist pattern using same
TOKYO OHKA KOGYO CO LTD0 citations40