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Inventor
OYAMA MASATOSHI
JP
5 patents
⚠️ This page may combine multiple inventors who share the name “OYAMA MASATOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
2 patents
US7585776B2
Sep 8, 2009
Dry etching method of insulating film
HITACHI HIGH TECH CORP
2 citations
60
US7354525B2
Apr 8, 2008
Specimen surface processing apparatus and surface processing method
HITACHI HIGH TECH CORP
0 citations
40
AGC INC
1 patent
US11489990B2
Nov 1, 2022
Optical element, optical system, and imaging apparatus
AGC INC
0 citations
48
HITACHI LTD
1 patent
US6960533B2
Nov 1, 2005
Method of processing a sample surface having a masking material and an anti-reflective film using a plasma
HITACHI LTD
1 citations
43
TORAY INDUSTRIES
1 patent
US8343619B2
Jan 1, 2013
Optical waveguide film
TORAY INDUSTRIES
0 citations
38