Inventor
KADONAGA KENTARO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “KADONAGA KENTARO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS8034673B2Oct 11, 2011
Film formation method and apparatus for forming silicon-containing insulating film doped with metal
TOKYO ELECTRON LTD74 citations97
US7964241B2Jun 21, 2011
Film formation method and apparatus for semiconductor process
TOKYO ELECTRON LTD75 citations95
US9142403B2Sep 22, 2015
Method of forming boron-containing silicon oxycarbonitride film and method of forming silicon oxycarbonitride film
TOKYO ELECTRON LTD1 citations51
US8871655B2Oct 28, 2014
Method of forming silicon oxycarbonitride film
TOKYO ELECTRON LTD0 citations50
US9076649B2Jul 7, 2015
Film forming method and apparatus
TOKYO ELECTRON LTD1 citations45
US9562285B2Feb 7, 2017
Film forming method, film forming apparatus and storage medium
TOKYO ELECTRON LTD0 citations41