Inventor
KAWASHIMA ISAMU
JP11 patents
⚠️ This page may combine multiple inventors who share the name “KAWASHIMA ISAMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO SEIMITSU CO LTD
4 patentsUS6946311B2Sep 20, 2005
Processing apparatus and wafer processing method
TOKYO SEIMITSU CO LTD8 citations71
US6805616B2Oct 19, 2004
Wafer planarization apparatus and planarization method thereof
TOKYO SEIMITSU CO LTD9 citations71
US7158910B2Jan 2, 2007
Device for calculating the quantity of light and method thereof
TOKYO SEIMITSU CO LTD0 citations50
US7490650B2Feb 17, 2009
Workpiece processing device
TOKYO SEIMITSU CO LTD0 citations49